Matty R. Caymax, Frederik Leys, Jerome Mitard, Koen Martens, Lijun Yang, Geoffrey Pourtois, Wilfried Vandervorst, Marc Meuris, Roger Loo
ECS Transactions
19
(1),
183-194,
2009-05-15
...We found that surface segregation of Ge through the Si layer takes place during the growth, which turns out to be determining for the interfacial trap density and distribution in the finalized gate stack...
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