HATTORI,Kiyoshi, IKENAGA,Osamu, WADA,Hitotsugu, TAMAMUSHI,Syuichi, NISHIMURA,Eiji, IKEDA,Naotaka,, KATOH,Yoshihide, KUSAKABE,Hideo, YOSHIKAWA,Ryoichi, TAKIGAWA,Tadahiro,
JJAP series
3
59-63,
1989-12-30
The generation of a triangular and rectangular shape beam is very useful in increasing throughput for writing ULSI patterns which often include many oblique lines. To make use of these shaped beams …
NDLデジタルコレクション