山下 崇博, 伊藤 寿浩, 須賀 唯知
エレクトロニクス実装学会誌
15
(1),
49-58,
2012
An anti-stiction coating with a self-assembled monolayer (SAM) was investigated for ohmic contact micro-electro-mechanical system (MEMS) switches with low-load contacts. SAMs of thiophenol (TP) or …
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