牧野 省吾, 鹿山 透, 室北 幾磨, 矢原 春樹, 大戸 基道
電気学会論文誌D(産業応用部門誌)
134
(7),
683-690,
2014
A multi-dimensional positioning mechanism, along with high speed and high accuracy, is necessary for an industrial machine. The positioning machine operates precisely in both vertical linear motion …
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