Zhaoyang Liu, Sen Huang, Qilong Bao, Xinhua Wang, Ke Wei, Haojie Jiang, Hushan Cui, Junfeng Li, Chao Zhao, Xinyu Liu, Jinhan Zhang, Qi Zhou, Wanjun Chen, Bo Zhang, Lifang Jia
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
34
(4),
2016-03-23
...Most important of all, about 2.6 × 1013 cm−2 positive fixed charges are confirmed to be present at the LPCVD-SiNx/III-nitride interface, as revealed by pulsed transfer characterizations and energy-band...
DOI
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