Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

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Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

chairmen/editors: Devendra K. Sadana, Carl M. Lampert ; cooperating organizations: American Vacuum Society, Electronic Materials and Process Division

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 463）

S.P.I.E.-- International Society for Optical Engineering, c1984

  • pbk.

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Includes bibliographies and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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