The materials science of microelectronics
著者
書誌事項
The materials science of microelectronics
VCH, c1995
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Aimed at students of materials science and engineering, chemical engineering, physics, chemistry and electrical and computer engineering, this text covers the materials science of microelectronics. Tutorial sections cover special methods of bulk and interfacial characterization.
目次
- The electronic structure of atoms and molecules
- the strucutre and electronic properties of crystalline solids
- semiconductor devices and circuits
- crystal growth
- epitaxy and dielectric deposition
- pattern definition and etching
- oxidation, doping and mettalization
- optical electronics.
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