MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

Author(s)

• El-Fatatry, Ayman
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5719）

SPIE, c2005

Other Title

MOEMS and miniaturized systems 5

MOEMS and miniaturized systems five

Microelectromechanical systems and miniaturized systems 5

Note

Includes bibliographical references and author index

Details

• NCID: BC08845459
• ISBN:
  • 0819456934
• LCCN: 2005298734
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xl, 190 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC22 : 621.36/7
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Miniature electronic equipment -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Optics, Adaptive -- Congresses
  • LCSH : Optical scanners -- Congresses
• Parent Bibliography ID:
  • BA0022700X