Micropatterning of Organic–Inorganic Hybrid Film Using Photosensitive Sol–Gel System Consisting of Double-decker-shaped Multifunctional Silsesquioxane

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  • Akira Watanabe
    Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
  • Tokuji Miyashita
    Institute of Multidisciplinary Research for Advanced Materials, Tohoku University

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Abstract

<jats:title>Abstract</jats:title> <jats:p>The micropatterning of an organic–inorganic hybrid film consisting of a double-decker-shaped multifunctional silsesquioxane was achieved using a photosensitive sol–gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.</jats:p>

Journal

  • Chemistry Letters

    Chemistry Letters 35 (10), 1130-1131, 2006-09-09

    Oxford University Press (OUP)

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