Studies on electron impact excitation of the group Ⅳ hydride molecules used in plasma processing プラズマプロセシング用Ⅳ族水素化物分子の電子衝突励起に関する研究
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著者
書誌事項
- タイトル
-
Studies on electron impact excitation of the group Ⅳ hydride molecules used in plasma processing
- タイトル別名
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プラズマプロセシング用Ⅳ族水素化物分子の電子衝突励起に関する研究
- 著者名
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Kyaw, Tint
- 著者別名
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チョウ, ティン
- 学位授与大学
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名古屋大学
- 取得学位
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工学博士
- 学位授与番号
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甲第2385号
- 学位授与年月日
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1990-12-15
注記・抄録
博士論文
目次
- Contents / p1 (0004.jp2)
- Chapter1. Introduction / p1 (0007.jp2)
- 1.1 Understanding of the Plasma Process / p1 (0007.jp2)
- 1.2 Optical Emission Spectroscopy / p4 (0010.jp2)
- 1.3 Studies on Fundamental Processes / p7 (0013.jp2)
- 1.4 Purpose and Composition of the Dissertation / p10 (0016.jp2)
- References for Chapter 1 / p12 (0018.jp2)
- Chapter2. Emission Cross Sections of the Fragments in Dissociative Excitation of Germane by Electron Impact / p16 (0022.jp2)
- 2.1 Introduction / p16 (0022.jp2)
- 2.2 Experimental Method / p17 (0023.jp2)
- 2.3 Results and Discussion / p19 (0025.jp2)
- 2.4 Summary / p34 (0040.jp2)
- References for Chapter2 / p35 (0041.jp2)
- Chapter3. Level Excitation Cross Sections of Atomic Fragments in Low-Energy Electron Impact Dissociation of Group IV Hydrides / p36 (0042.jp2)
- 3.1 Introduction / p36 (0042.jp2)
- 3.2 Experimental Method / p37 (0043.jp2)
- 3.3 Data Analysis / p39 (0045.jp2)
- 3.4 Results / p41 (0047.jp2)
- 3.5 Discussion / p49 (0055.jp2)
- 3.6 Summary / p51 (0057.jp2)
- References for Chapter3 / p52 (0058.jp2)
- Chapter4. Lifetimes of Neutral and and Singly-Ionized Germanium / p54 (0060.jp2)
- 4.1 Introduction / p54 (0060.jp2)
- 4.2 Experimental Method and Data Analysis / p56 (0062.jp2)
- 4.3 Results and Discussion / p59 (0065.jp2)
- 4.4 Summary / p65 (0071.jp2)
- References for Chapter4 / p66 (0072.jp2)
- Chapter5. Conclusion / p68 (0074.jp2)
- Appendix A / p72 (0078.jp2)
- The Expression for the Optical Emission Cross Section in Terms of Measurable Quantities / p72 (0078.jp2)
- Appendix B / p75 (0081.jp2)
- Level Excitation Cross Section and Cascade Contribution in the Atomic Emission Induced by Electron Impact Dissociation of Molecules / p75 (0081.jp2)
- Appendix C / p82 (0088.jp2)
- Calculation of the Ge ɪ Lifetimes Using the LS-Coupling Scheme Formulae / p82 (0088.jp2)
- Papers Concerned with this Dissertation / p86 (0092.jp2)
- Acknowledgments / p89 (0095.jp2)