Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands

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Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands

M. Weck, chair/editor ; organized by ANRT--Association nationale de la recherche technique, SPIE--the International Society for Optical Engineering ; cooperating sponsors, Comité belge d'optique ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 803）

SPIE, c1987

  • pbk.

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Papers delivered at a meeting held within the framework of the Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, Hague, 30 Mar. to 3 Apr., 1987

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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