Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California
International Society for Optical Engineering
1982
Proceedings / SPIE -- the International Society for Optical Engineering
v. 333
pbk.
Available at 4 libraries