ID:DA01728346
Conference on Solid-State Sensors and Actuators, International
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Springer 2001
v. 1 , v. 2
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The institute of Electrical Engineers of Japan c1999
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sponsored by IEEE Electron Devices Society
Institute of Electrical and Electronics Engineers c1997
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Foundation for Sensor and Actuator Technology c1995
[Sponsored by The Institute of Electrical Engineers of Japan and Japan Science Foundation]
Publication Committee of Transducers'93 ; c1993
[sponsores, Electron Devices Society of IEEE ... [et al.]]
IEEE c1991
: soft. , : case. , : micro.
The Institute of Electrical Engineers of Japan, 1987
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Institute of Electrical and Electronics Engineers c1985
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Delft University of Technology 1983