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T. Venkatesan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH
SPIE c1990 Proceedings / SPIE -- the International Society for Optical Engineering v.1187
Available at 6 libraries
editors, S.L. Bernasek, T. Venkatesam, H. Temkin
Materials Research Society c1988 Materials Research Society symposium proceedings v. 126
Available at 14 libraries