ID:DA03451844
International Conference on Ion Implantation:Equipment and Techniques
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editors, H. Ryssel and H. Glawischnig
Springer-Verlag 1983 Springer series in electrophysics v. 11
u.s , ger
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Springer-Verlag 1982 Springer series in electrophysics v. 10
: us , : gw
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