Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
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Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
（Springer series in electrophysics, v. 11）
Springer-Verlag, 1983
- u.s
- ger
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Includes bibliographical references and index
