ID:DA03926114
Symposium on Electron, Ion, and Photon Beams, International
Electron, Ion, and Photon Beams, International Symposium on
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special editor for the proceedings, Randy Kubena
Published for the American Vacuum Society by the American Institute of Physics 1992 Journal of vacuum science & technology B . vol. 10, no. 6
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special editor for the proceedings, Jane Shaw
Published for the American Vacuum Society by the American Institute of Physics 1991 special casebound ed.