Workshop on Tungsten and Other Refractory Metals for VLSI Applications

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Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.

sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley ; editor, Eliot K. Broadbent ; associate editors, Robert S. Blewer ... [et al]

Materials Research Society c1987 Materials Research Society conference proceedings

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Tungsten and other refractory metals for VLSI applications : proceedings of the 1985 workshop held October 7-9, 1985, Albuquerque, New Mexico, U.S.A. and the 1984 workshop held November 12-13, 1984, Albuquerque, New Mexico, U.S.A.

editor, Robert S. Blewer

Materials Research Society c1986

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