Tungsten and other refractory metals for VLSI applications : proceedings of the 1985 workshop held October 7-9, 1985, Albuquerque, New Mexico, U.S.A. and the 1984 workshop held November 12-13, 1984, Albuquerque, New Mexico, U.S.A.

著者

• Workshop on Tungsten and Other Refractory Metals for VLSI Applications
• Workshop on Tungsten and Other Refractory Metals for VLSI Applications
• Blewer, R. S.

書誌事項

Tungsten and other refractory metals for VLSI applications : proceedings of the 1985 workshop held October 7-9, 1985, Albuquerque, New Mexico, U.S.A. and the 1984 workshop held November 12-13, 1984, Albuquerque, New Mexico, U.S.A.

editor, Robert S. Blewer

Materials Research Society, c1986

注記

Includes bibliography and index

詳細情報

• NII書誌ID(NCID): BA20518832
• ISBN:
  • 0931837324
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa
• ページ数/冊数: xv, 571 p.
• 大きさ: 24 cm