ID:DA09503601
Conference on Integrated Circuit Metrology, Inspection, and Process Control, SPIE
SPIE Conference on IC Circuit Metrology, Inspection, and Process Control
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Marylyn Hoy Bennett chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
SPIE c1994 Proceedings / SPIE -- the International Society for Optical Engineering v. 2196
Available at 2 libraries
Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
SPIE c1993 Proceedings / SPIE -- the International Society for Optical Engineering v. 1926
SPIE c1992 Proceedings / SPIE -- the International Society for Optical Engineering v. 1673