Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California

著者

• Postek, Michael T.
• Society of Photo-optical Instrumentation Engineers
• SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control

書誌事項

Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California

Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1673）

SPIE, c1992

注記

"Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992"--Introd.

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA26385990
• ISBN:
  • 081940828X
• LCCN: 91061053
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xi, 697 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/5
• 件名:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• 親書誌ID:
  • BA0022700X