Chang, Shih-Chia

ID:DA1390162X

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  • Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

    Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology

    SPIE c1997 Proceedings / SPIE -- the International Society for Optical Engineering v. 3223

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  • Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

    Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories

    SPIE--The International Society of Optical Engineering c1996 Proceedings / SPIE -- the International Society for Optical Engineering v. 2879

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