Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

著者

• Pang, Stella W.
• Chang, Shih-Chia
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• National Institute of Standards and Technology (U.S.)

書誌事項

Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2879）

SPIE--The International Society of Optical Engineering, c1996

詳細情報

• NII書誌ID(NCID): BA61047748
• ISBN:
  • 0819422770
• LCCN: 96069473
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 366 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X