Physical sputtering of single-element solids

著者

• Behrisch, Rainer
• Andersen, Hans Henrik

書誌事項

Physical sputtering of single-element solids

edited by R. Behrisch, with contributions by H.H. Andersen ... [et al.]

（Topics in applied physics, v. 47 . Sputtering by particle bombardment / edited by R. Behrisch ; 1）

Springer-Verlag, 1981

• : Ger
• : U.S

注記

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA00899234
• ISBN:
  • 3540105212
  • 0387105212
• 出版国コード: gw
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Berlin ; New York
• ページ数/冊数: x, 281 p.
• 大きさ: 24 cm
• 分類:
  • LCC : QC176.8.S72
  • DC19 : 530.4/1
• 件名:
  • LCSH : Sputtering (Physics)
  • LCSH : Solids -- Effect of radiation on
  • LCSH : Surfaces (Physics) -- Effect of radiation on
• 親書誌ID:
  • BA00371072