Physical sputtering of single-element solids

Author(s)

• Behrisch, Rainer
• Andersen, Hans Henrik

Bibliographic Information

Physical sputtering of single-element solids

edited by R. Behrisch, with contributions by H.H. Andersen ... [et al.]

（Topics in applied physics, v. 47 . Sputtering by particle bombardment / edited by R. Behrisch ; 1）

Springer-Verlag, 1981

• : Ger
• : U.S

Note

Includes bibliographical references and indexes

• NCID: BA00899234
• ISBN:
  • 3540105212
  • 0387105212
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin ; New York
• Pages/Volumes: x, 281 p.
• Size: 24 cm
• Classification:
  • LCC : QC176.8.S72
  • DC19 : 530.4/1
• Subject Headings:
  • LCSH : Sputtering (Physics)
  • LCSH : Solids -- Effect of radiation on
  • LCSH : Surfaces (Physics) -- Effect of radiation on
• Parent Bibliography ID:
  • BA00371072