Sputtering of alloys and compounds, electron and neutron sputtering, surface topography

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Sputtering of alloys and compounds, electron and neutron sputtering, surface topography

edited by R. Behrisch ; with contributions by R. Behrisch ... [et al.]

（Topics in applied physics, v. 52 . Sputtering by particle bombardment / edited by R. Behrisch ; 2）

Springer-Verlag, 1983

  • : Ger
  • : U.S

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Includes bibliographical references and indexes

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