Ion implantation : science and technology

Author(s)

• Ziegler, J. F.

Bibliographic Information

Ion implantation : science and technology

edited by J.F. Ziegler

Academic Press, 1984

• alk. paper

Note

Includes index

Details

• NCID: BA01370949
• ISBN:
  • 0127806202
• LCCN: 84045412
• Country Code: us
• Title Language Code: eng
• Place of Publication: Orlando, FL
• Pages/Volumes: 635 p.
• Size: 24 cm
• Classification:
  • LCC : QC702.7.I55
  • DC19 : 539/.6
• Subject Headings:
  • LCSH : Ion implantation