The physics of microfabrication

Author(s)

• Brodie, Ivor
• Muray, Julius J.

Bibliographic Information

The physics of microfabrication

Ivor Brodie and Julius J. Muray

Plenum Press, c1982

Note

Bibliography: p. 471-489

Includes index

Details

• NCID: BA01461465
• ISBN:
  • 0306408635
• LCCN: 82003835
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xix, 503 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Microelectronics
  • LCSH : Thin-film circuits