Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

Author(s)

• Osgood, R. M.
• Brueck, S. R. J.
• Schlossberg, H. R.
• United States. Air Force. Office of Scientific Research

Bibliographic Information

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg

（Materials Research Society symposium proceedings, v. 17）

North-Holland, c1983

Note

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso

Includes bibliographical references and indexes

Details

• NCID: BA03265606
• ISBN:
  • 0444007822
• LCCN: 83008028
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xiii, 298 p.
• Size: 24 cm
• Classification:
  • LCC : TA1673
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Semiconductors -- Congresses
• Parent Bibliography ID:
  • BA00013775