Deposition and growth : limits for microelectronics, Anaheim, CA 1987

Author(s)

• Rubloff, G. W. (Gary W.)

Bibliographic Information

Deposition and growth : limits for microelectronics, Anaheim, CA 1987

editor, G.W. Rubloff

（AIP conference proceedings, no. 167 . American Vacuum Society series ; 4）

American Institute of Physics, 1988

Note

DOE CONF-8711124

Includes bibliographies and index

Details

• NCID: BA06598037
• ISBN:
  • 0883183676
• LCCN: 88071432
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: 388 p.
• Size: 25 cm
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
• Parent Bibliography ID:
  • BA00284604