Rubloff, G. W. (Gary W.)

ID:DA03029450

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Integrated processing for micro- and optoelectronics : proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 E-MRS Spring Conference, Strasbourg, France, May 4-7, 1993

edited by Y.I. Nissim, A. Katz, G.W. Rubloff

North-Holland c1994 European Materials Research Society symposia proceedings v. 42

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2

Deposition and growth : limits for microelectronics, Anaheim, CA 1987

editor, G.W. Rubloff

American Institute of Physics 1988 AIP conference proceedings no. 167 . American Vacuum Society series ; 4

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