Proceedings : 2nd IEEE Workshop on Micro Electro Mechanical Systems(MEMS), Salt Lake City, Utah, February 20-22, 1989

著者

• IEEE Workshop on Micro Electro Mechanical Systems
• IEEE Robotics and Automation Council

書誌事項

Proceedings : 2nd IEEE Workshop on Micro Electro Mechanical Systems(MEMS), Salt Lake City, Utah, February 20-22, 1989

sponsored by the IEEE Robotics and Automation Council

IEEE, c1989

タイトル別名

Micro electro mechanical systems

注記

IEEE catalog number 89THO249-3

詳細情報

• NII書誌ID(NCID): BA07020713
• LCCN: 88083988
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, NJ
• ページ数/冊数: xii, 156 p.
• 大きさ: 28 cm