Proceedings : 2nd IEEE Workshop on Micro Electro Mechanical Systems(MEMS), Salt Lake City, Utah, February 20-22, 1989

Author(s)

• IEEE Workshop on Micro Electro Mechanical Systems
• IEEE Robotics and Automation Council

Bibliographic Information

Proceedings : 2nd IEEE Workshop on Micro Electro Mechanical Systems(MEMS), Salt Lake City, Utah, February 20-22, 1989

sponsored by the IEEE Robotics and Automation Council

IEEE, c1989

Other Title

Micro electro mechanical systems

Note

IEEE catalog number 89THO249-3

Details

• NCID: BA07020713
• LCCN: 88083988
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, NJ
• Pages/Volumes: xii, 156 p.
• Size: 28 cm