ID:DA04552610
Workshop on Micro Electro Mechanical Systems, IEEE
MEMS
M.E.M.S.
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sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg
IEEE Service Center c1998
: soft , : case , : micro
所蔵館7館
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center
IEEE Service Center c1997
所蔵館5館
sponsored by the IEEE Robotics and Automation Society
IEEE Service Center c1996
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
IEEE Service Center c1995
: soft. , : case. , : micro.
所蔵館6館
IEEE Service Center c1994
IEEE Service Center c1993
sponsored by the IEEE Robotics and Automation Society, and in cooperation with the German IEEE Section ; W. Benecke, H.-C. Petzold (eds.)
IEEE 1992
所蔵館12館
sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division
IEEE c1991
所蔵館8館
IEEE
IEEE c1990
sponsored by the IEEE Robotics and Automation Council
IEEE c1989
所蔵館1館
