Diffusion phenomena in thin films and microelectronic materials

Author(s)

• Gupta, Devendra
• Ho, P. S.

Bibliographic Information

Diffusion phenomena in thin films and microelectronic materials

edited by Devendra Gupta and Paul S. Ho

Noyes Publications, c1988

Note

Includes bibliographies and index

Details

• NCID: BA07037807
• ISBN:
  • 0815511671
• LCCN: 88022634
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Park Ridge, N.J., U.S.A.
• Pages/Volumes: xvi, 588 p.
• Size: 24 cm
• Classification:
  • LCC : QC176.84.D54
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Diffusion
  • LCSH : Thin films
  • LCSH : Microstructure