Diffusion phenomena in thin films and microelectronic materials
著者
書誌事項
Diffusion phenomena in thin films and microelectronic materials
Noyes Publications, c1988
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注記
Includes bibliographies and index
内容説明・目次
内容説明
A comprehensive review of diffusion phenomena in thin films and microelectronic materials - theory and technology. Contents include: Bulk Solids and Thin Films Anelastic Relaxation and Diffusion in Thin-Layer Materials Diffusion in Artificially Modulated Thin Films Diffusion and Growth in Oxide Films Diffusion Induced Grain Boundary Migration in Thin Films Effects of Ambients on Thin Film Interactions Electromigration in Metallic Thin Films Diffusion Barriers in Semiconductor Contract Metallization Thermal Stability of Lead-Alloy Josephson Junctions Diffusion and Electromigration of Impurities in Lead Solders.
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