Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982

著者

• Ion Implantation School
• Ryssel, Heiner
• Glawischnig, H. (Hans)
• International Conference on Ion Implantation: Equipment and Techniques

書誌事項

Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982

editors, H. Ryssel and H. Glawischnig

（Springer series in electrophysics, v. 10）

Springer-Verlag, 1982

• : us
• : gw

注記

Includes bibliographies and index

• NII書誌ID(NCID): BA07160406
• ISBN:
  • 0387118780
  • 3540118780
• LCCN: 82016883
• 出版国コード: gw
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Berlin ; New York
• ページ数/冊数: xii, 372 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Ion implantation -- Addresses, essays, lectures
  • LCSH : Semiconductor doping -- Addresses, essays, lectures
• 親書誌ID:
  • BA00046082