Silicides for VLSI applications
著者
書誌事項
Silicides for VLSI applications
Academic Press, 1983
- タイトル別名
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Silicides for V.L.S.I. applications
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注記
Bibliography: p. 177-186
Includes indexes
内容説明・目次
内容説明
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
目次
Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.
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