Cryopumping : theory and practice

Bibliographic Information

Cryopumping : theory and practice

René A. Haefer ; translated by Jack Shipwright

(Monographs on cryogenics, 4)

Clarendon Press , Oxford University Press, 1989

Other Title

Kryo-Vakuumtechnik

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Note

Translation of: Kryo-Vakuumtechnik

Bibliography: p. 382-403

Includes index

Description and Table of Contents

Description

In recent years the importance of cryopumping, the production of a vacuum through the use of low temperatures, has increased greatly. This is a result on the one hand of new areas of use, and on the other of increased demands in many vacuum procedures for ultra-clean gas atmospheres, low final pressures and high specific pumping speeds. This book is an attempt to provide a comprehensive account of cryopumping, covering the physical theory, practical techniques and applications of cryopumping, as well as recent developments which have resulted in pumps that are safe in operation, allow full automation and are superior to conventional pumps.

Table of Contents

  • Gas flow at low pressure
  • cryocondensation of uniform gases
  • cryosorption on gas condensates and porous solids
  • cryocondensation of gas mixtures - cryotrapping
  • cryogettering on metal films - the 80 K titanium sublimation pump
  • performance parameters of cryopumps
  • design of cryopumps, instrumentation and components
  • applications of cryopumping.

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