Cryopumping : theory and practice
著者
書誌事項
Cryopumping : theory and practice
（Monographs on cryogenics, 4）
Clarendon Press , Oxford University Press, 1989
- タイトル別名
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Kryo-Vakuumtechnik
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注記
Translation of: Kryo-Vakuumtechnik
Bibliography: p. 382-403
Includes index
内容説明・目次
内容説明
In recent years the importance of cryopumping, the production of a vacuum through the use of low temperatures, has increased greatly. This is a result on the one hand of new areas of use, and on the other of increased demands in many vacuum procedures for ultra-clean gas atmospheres, low final pressures and high specific pumping speeds. This book is an attempt to provide a comprehensive account of cryopumping, covering the physical theory, practical techniques and applications of cryopumping, as well as recent developments which have resulted in pumps that are safe in operation, allow full automation and are superior to conventional pumps.
目次
- Gas flow at low pressure
- cryocondensation of uniform gases
- cryosorption on gas condensates and porous solids
- cryocondensation of gas mixtures - cryotrapping
- cryogettering on metal films - the 80 K titanium sublimation pump
- performance parameters of cryopumps
- design of cryopumps, instrumentation and components
- applications of cryopumping.
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