Ion implantation, sputtering and their applications

Author(s)

• Townsend, Peter David
• Kelly, J. C. (John Clive)
• Hartley, W. N.

Bibliographic Information

Ion implantation, sputtering and their applications

by P. D. Townsend, J. C. Kelly, N. E. W. Hartley

Academic Press, 1976

Note

Includes bibliographies and index

Details

• NCID: BA07511624
• ISBN:
  • 0126969507
• LCCN: 75196983
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: London ; New York
• Pages/Volumes: ix, 333 p.
• Size: 24 cm
• Classification:
  • LCC : QC702.7.I55
  • DC : 530.4/1
• Subject Headings:
  • LCSH : Ion implantation
  • LCSH : Sputtering (Physics)