Excimer beam applications, 6 September 1988, Boston, Massachusetts

Author(s)

• Pirri, Anthony N.
• Piwczyk, Bernhard P.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Excimer beam applications, 6 September 1988, Boston, Massachusetts

Anthony N. Pirri, Bernhard P. Piwczyk, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Applied Optics Laboratory/New Mexico State University ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 998）

SPIE--International Society for Optical Engineering, c1988

Note

Includes bibliographies and index

Details

• NCID: BA09832979
• ISBN:
  • 0819400335
• LCCN: 88062998
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 128 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X