SEM microcharacterization of semiconductors

著者

• Holt, D. B.
• Joy, David C.

書誌事項

SEM microcharacterization of semiconductors

edited by D.B. Holt, D.C. Joy

（Techniques of physics, 12）

Academic Press, c1989

内容説明・目次

内容説明

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

目次

Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA10022466
• ISBN:
  • 0123538556
• 出版国コード: uk
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: London ; Tokyo
• ページ数/冊数: xiii, 452 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • UDC : 621.382.3
  • DC20 : 621.38152
• 件名:
  • PRECIS : Semiconductor devices
  • LCSH : Semiconductors
• 親書誌ID:
  • BA00051592