An introduction to semiconductor microtechnology

著者

書誌事項

An introduction to semiconductor microtechnology

D.V. Morgan, K. Board

J. Wiley, c1990

2nd ed

大学図書館所蔵 件 / 全9件

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

Written as a "first exposure" to semiconductor microtechnology, this classic text places emphasis on the principles of the topic. The text presents an introduction to the development of microtechnology; is concerned with the growth and preparation of semiconducting materials; discusses the process of doping and type-conversion, and the twin technologies of diffusion and ion implantation; deals with oxidation, the process of photolithography, metallization, interconnections, and bonding; considers the structure and processing of circuit components and integrated circuits; and speculates on future trends in semiconductor microtechnology. Fully revised and updated, this second edition is presented in a more reader- friendly style, including instructional objectives and self- evaluation questions, plus problems at the ends of chapters. No particular mathematics skills or specialist knowledge is needed to be able to use this text effectively.

目次

  • The development of semiconductor technology
  • materials for semiconductor devices
  • impurity doping in semiconductors
  • insulating films on semiconductors
  • photolithography
  • metallization, interconnections, and packaging
  • fabrication of devices and circuits
  • MOS and bipolar technologies and their applications
  • future developments in semiconductor technology.

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