Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California

著者

• Craighead, Harold G.
• Narayan, J. (Jaydish)
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

書誌事項

Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California

Harold G. Craighead, J. Narayan, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 945）

SPIE, c1988

注記

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA10254734
• ISBN:
  • 0892529806
• LCCN: 88060789
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 164 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X