Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.

著者

• Wong, S. Simon
• Furukawa, Seijiro
• Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications V
• Materials Research Society

書誌事項

Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.

editors, S. Simon Wong, Seijiro Furukawa ; associate editors, Roc Blumenthal ... [et al.] ; sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and October 19-20, 1989, Tokyo, Japan, sponsored by the Japan Society of Applied Physics

（Materials Research Society conference proceedings）

Materials Research Society, c1990

注記

Includes bibliography and index

詳細情報

• NII書誌ID(NCID): BA10979941
• ISBN:
  • 1558990682
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa
• ページ数/冊数: xvi, 427 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA07468230