Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug 28-Sept 1, 1989

著者

• Craievich, Aldo
• de Souza, G. Gerson Bezerra
• Baranauskas, Vitor
• Workshop on Microlithography : High Integration in Microelectronics

書誌事項

Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug 28-Sept 1, 1989

editors, Aldo Craievich, G. Gerson Bezerra de Souza, Vitor Baranauskas

World Scientific, c1990

注記

At head cover title: First Workshop

詳細情報

• NII書誌ID(NCID): BA11057841
• ISBN:
  • 9810201370
• 出版国コード: si
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Singapore
• ページ数/冊数: viii, 184 p.
• 大きさ: 23 cm