Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989

著者

• International Conference on the Science and Technology of Defect Control in Semiconductors
• 角野, 浩二 スミノ, コウジ

書誌事項

Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989

edited by K. Sumino

North-Holland , Distributors for the U.S. and Canada, Elsevier Science Pub., 1990

• v. 1
• v. 2

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA11471035
• ISBN:
  • 0444884297
  • 0444884297
• LCCN: 90042223
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam ; Tokyo,New York, N.Y., U.S.A.
• ページ数/冊数: 2 v.
• 大きさ: 27 cm
• 分類:
  • LCC : QC611.6.D4
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Defects -- Congresses
  • LCSH : Materials -- Defects -- Congresses