Materials and processes for microelectronic systems
著者
書誌事項
Materials and processes for microelectronic systems
（Ceramic transactions, v. 15）
American Ceramic Society, c1990
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注記
"Proceedings of the Symposium on Materials and Processes for Microelectronic Systems held during the First International Ceramic Science and Technology Congress held in Anaheim, CA, on October 31-November 3, 1989"--T.p. verso
Includes index