Secondary ion mass spectrometry
著者
書誌事項
Secondary ion mass spectrometry
Wiley, 1990
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内容説明・目次
内容説明
These are the proceedings of the SIMS VII, which was the seventh in a series of conferences held biennially. It was dedicated to the memory of Donald E. Harrison, Jr and his pioneering research in the mechanisms of ion beam sputtering and in the use of molecular dynamics simulations for the study of ion bombardment of solids. Other than the Harrison memorial papers, speakers at the conference covered three other major areas. These were: organic and biological analyses; enhancement techniques; and the contribution of SIMS to the semiconductor industry.
目次
- Fundamentals
- quantitation
- complementary techniques
- organic and biological analyses
- geologic applications
- depth profiling and semiconductor applications
- high temperature superconductors
- metallurgical applications
- static SIMS and the analysis of polymers
- instrumentation
- imaging.
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