Ion tracks and microtechnology : principles and applications

Author(s)

• Spohr, Reimar
• Bethge, Klaus

Bibliographic Information

Ion tracks and microtechnology : principles and applications

Reimar Spohr ; edited by Klaus Bethge

Vieweg, c1990

Note

Includes bibliographical references and index

Details

• NCID: BA1285411X
• ISBN:
  • 3528063300
• LCCN: 90229102
• Country Code: gw
• Title Language Code: eng
• Place of Publication: Braunschweig
• Pages/Volumes: ix, 272 p.
• Size: 25 cm
• Classification:
  • LCC : TA418.6
• Subject Headings:
  • LCSH : Materials -- Effect of radiation on
  • LCSH : Ion bombardment -- Industrial applications
  • LCSH : Ion beam lithography