Characteristics of sputtered particles, technical applications

著者

• Behrisch, Rainer
• Wittmaack, K.

書誌事項

Characteristics of sputtered particles, technical applications

edited by R. Behrisch and K. Wittmaack ; with contributions by R. Behrisch ... [et al.]

（Topics in applied physics, v. 64 . Sputtering by particle bombardment / edited by R. Bhrisch and K. Wittmaack ; 3）

Springer-Verlag, c1991

• : gw
• : us

注記

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA13027998
• ISBN:
  • 3540534288
  • 0387534288
• 出版国コード: gw
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Berlin ; Tokyo
• ページ数/冊数: xiii, 410 p.
• 大きさ: 24 cm
• 分類:
  • LCC : QC176.8.S72
  • DC19 : 530.4/1
• 件名:
  • LCSH : Sputtering (Physics)
  • LCSH : Solids -- Effect of radiation on
  • LCSH : Surfaces (Physics) -- Effect of radiation on
• 親書誌ID:
  • BA00371072